| 摘要 |
<p>PURPOSE:To detect a uniform flow rate and then to achieve an accurate and sensitive flow rate measurement by setting the width of a settling space to be equal to or more than that of a jet nozzle and then providing a flow sensor in parallel with a fluidic vibration surface. CONSTITUTION:A settling space 10 is formed so that a channel is narrowed as compared with a flow-in pipe 1 by one step and then a jet nozzle 4 where the channel is narrowed further by one step via a flow reduction part 4 continues. Namely, the width of the space 10 is set to be more than that of a nozzle 5. Therefore, the flow of a fluid which is introduced from the flow-in pipe 1 is rectified from three-dimensional flow to two-dimensional flow through the space 10. Further, the speed distribution becomes a stable flow due to the flow into the nozzle 5 via the narrow reduction part 4 and the flow is emitted into the channel expansion part 6 from the nozzle 5. Therefore, since a uniform flow rate from the space 10 toward the reduction part 4 is detected by a flow sensor 11, the flow rate can be measured sensitively and accurately.</p> |
