发明名称 INSPECTION APPARATUS FOR WIRING PATTERN
摘要 PURPOSE:To reduce a false report and to inspect a wiring pattern stably by a method wherein the feature of the wiring pattern extracted from a binary-coded image is compared with reference data which has been extracted from a good board in advance. CONSTITUTION:A shading image obtained by sensing 103 the image of a printed-circuit board 101 as an object under test is converted 105 into a binary-coded image. Feature information on a wiring pattern is extracted 106 from a skelton image obtained by processing all picture elements into fine elements, and it is compared 109 with feature information (reference data) extracted 106 from a good board in advance. When they are compared and judged, a first arbitray judgment region is set around a noticeable feature point tn on a board under test. When a feature point rn on the good board does not correspond, the distance sl between the feature point tn and one or more feature points tn-i whose correspondence has been finished is found. A second judgment region is set around the point of the distance sl from a feature point rn-i whose correspondence has been finished, the existence of the corresponding feature point rn is judged, a plurality of existing coordinate points are made to correspond surely, and only an intrinsic flaw is extracted and registered in an information memory 112.
申请公布号 JPH06109446(A) 申请公布日期 1994.04.19
申请号 JP19920261146 申请日期 1992.09.30
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MARUYAMA YUJI;KAWAMURA HIDEAKI;YAMAMOTO ATSUHARU;MATSUZAKI TAKATOSHI
分类号 G01B11/24;G01N21/88;G01N21/93;G01N21/956;G03F1/84;G06T1/00;G06T7/00;H01L21/027;H01L21/30;H01L21/66;H05K3/00 主分类号 G01B11/24
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