Pulse laser apparatus

摘要

PCT No. PCT/JP91/00152 Sec. 371 Date Dec. 17, 1991 Sec. 102(e) Date Dec. 17, 1991 PCT Filed Feb. 8, 1991.By dissipating a reverse voltage energy occurring on the pulse generation capacitor (4) of a pulse laser apparatus through the diode (11) connected in parallel with this pulse generation capacitor (4), arc or streamer becomes not occurring, and hence the lifetime of the main discharge electrodes become long and a high-repetition rate oscillation becomes possible.