Process of etching semiconductors and etchant solutions used therefor,申请号US19600070437-传众专利搜索

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发明名称	Process of etching semiconductors and etchant solutions used therefor
摘要
申请公布号	US3107188(A)	申请公布日期	1963.10.15
申请号	US19600070437	申请日期	1960.11.21
申请人	PACIFIC SEMICONDUCTORS, INC.	发明人	HANCOCK ROBERT D.
分类号	H01L21/306;H01L21/311	主分类号	H01L21/306
代理机构		代理人
主权项
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