发明名称 DISPATCHING DEVICE
摘要 PURPOSE: To obtain a dispatching apparatus with a gas-supplying and dispersing system for operating and containing a pressurized sealed portable container by providing a structure which can hold positive differential pressure in the container with respect to the outer environment during the containing time. CONSTITUTION: A dispatching apparatus 300 with a gas-supplying and dispersing system has an automatic handler 301 and a vertical stocker 302. The vertical stocker has a flame 308, formed by a plurality of support stations or an assembly of tubes supporting bottles 309, each bottle has a gas-injecting means 311 which on the one hand is connected to a gas-injecting valve means, on the other hand is connected to a compressed ultrapure neutral gas-supplying facility. The automatic handler 301 is fit for carrying the container 100 between the vertical stock and conventional conveyors 401, 402, or between these conveyors. Thus, the overpressure of the compressed ultrapure neutral gas can be held in the container inner space during an idle processing period.
申请公布号 JPH06104332(A) 申请公布日期 1994.04.15
申请号 JP19930158473 申请日期 1993.06.29
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 JIYORUJIYU GARITSUKU;ANDORE RAFUONDO
分类号 B65G49/07;B65D85/86;G03F7/20;H01L21/673;H01L21/677;(IPC1-7):H01L21/68 主分类号 B65G49/07
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