| 摘要 |
<p>PURPOSE:To accurately measure the relative fine displacement quantity of fixing means by splitting and guiding the light from a light source to light reflecting means arranged on the fixing means respectively, and detecting the phase difference between the interference light caused by the expansion/shrinkage of an expanding/shrinking means. CONSTITUTION:An operating device 10 is constituted of an expanding/shrinking device 12 expanded or shrunk at least in one direction, an optical device 14 arranged on the expanding/shrinking device 12 and allowing the light to interfere, and an arithmetic control device measuring the expansion/shrinkage quantity of the expanding/shrinking device 12 based on the interference light to control the expansion/shrinkage. Fixing units 20, 22 provided with attraction sections 24 are connected to expanding/shrinking units 18 provided with expanding/shrinking elements, the attraction sections 24 are attracted or released in turn to fix or release the fixing units 20, 22 from a shift reference section respectively, and the expanding/shrinking device 12 is moved like a measuring worm. The monochromatic light from a light source is split and radiated to reflecting mirrors 42, 44 arranged on the fixing units 20, 22 via a common wavelength plate 40, the reflected light is received by light receivers 56, 60, the phase difference between the interference light is detected, and the relative fine displacement quantity of the fixing units 20, 22 is measured.</p> |
