FORMATION OF THIN FILM PATTERN,申请号JP19920249755-传众专利搜索

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发明名称	FORMATION OF THIN FILM PATTERN
摘要
申请公布号	JPH06104172(A)	申请公布日期	1994.04.15
申请号	JP19920249755	申请日期	1992.09.18
申请人	FUJITSU LTD	发明人	AOYAMA SUSUMU
分类号	H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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