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发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPH06104212(A)
申请公布日期
1994.04.15
申请号
JP19920249666
申请日期
1992.09.18
申请人
NEC CORP
发明人
AKIMOTO KENJI
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
C23F4/00
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代理人
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