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发明名称
METHOD AND APPARATUS FOR DRYING SUBSTRATE
摘要
申请公布号
JPH06104239(A)
申请公布日期
1994.04.15
申请号
JP19920275512
申请日期
1992.09.18
申请人
NIPPON STEEL CORP
发明人
TAKEUCHI HIDEKI
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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