| 摘要 |
PURPOSE:To make it possible to simplify a process and facilitate a mass production, by sequentially forming a substrate, a semiconductor film, a surface electrode or the like of which a solar cell element is made on a base material with a plasma spray coating and peeling the cell element from the base material after completing the spray coating process. CONSTITUTION:A plurality of plasma spray coating devices 9 to 13 are placed to one main side of a base material 6. Also, the base material 6 is sequentially moved to one direction by a base material feeding mechanism 8. A substrate 1 serving as a support plate of a solar cell is formed on the base material 6 by a plasma spray coating method. A first conductive type semiconductor film 2 is formed on the substrate 1 and a second conductive type semiconductor film 3 is formed on the semiconductor film 2 and a surface electrode film 4 is formed on a desired position of the semiconductor film 3 in sequence. Further, an optical reflection preventive film 5 is formed on the second conductive type semiconductor film 3. After completing the spray coating process, a formed element is peeled from the base material 6. Thus, a process of forming a solar cell element can be simplified. |
