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经营范围
发明名称
Halbleiterfehlertester.
摘要
申请公布号
DE3884040(T2)
申请公布日期
1994.04.14
申请号
DE19883884040T
申请日期
1988.04.08
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
SPROGIS, EDMUND JURIS, JERICHO VERMONT 05465, US
分类号
H01L21/66;G01R31/02;G01R31/28;G11C29/24;(IPC1-7):G01R31/28
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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