发明名称 |
METHOD OF OPERATING A CLAW-TYPE VACUUM PUMP, AND A CLAW-TYPE VACUUM PUMP SUITABLE FOR CARRYING OUT THE METHOD |
摘要 |
The invention concerns a method of operating a claw-type vacuum pump (1) with two or more stages, each of which has a suction chamber (8, 9) with a pair of claw rotors (4, 5; 6, 7) and end-located suction and discharge ports (25, 27; 30, 31, 32). In order to avoid the possibility of liquids affecting the operation of the pump, the invention proposes that the pump (1) is operated without internal compression and that the gas emerging from at least one -- and preferably all -- stage(s) is cooled. |
申请公布号 |
WO9408141(A1) |
申请公布日期 |
1994.04.14 |
申请号 |
WO1993EP02349 |
申请日期 |
1993.08.31 |
申请人 |
LEYBOLD AKTIENGESELLSCHAFT |
发明人 |
KOBUS, ANDREAS;GOTTSCHLICH, UWE;BRENNER, LOTHAR;KRIEHN, HARTMUT |
分类号 |
F04C25/02;F04C18/12;F04C23/00;F04C29/04 |
主分类号 |
F04C25/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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