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发明名称
摘要
申请公布号
JPH0628300(B2)
申请公布日期
1994.04.13
申请号
JP19870200176
申请日期
1987.08.10
申请人
NIPPON ELECTRIC CO
发明人
YOSHITAKE KAZUKI
分类号
H01L21/8238;H01L27/08;H01L27/092;H01L29/78;(IPC1-7):H01L27/092;H01L29/784
主分类号
H01L21/8238
代理机构
代理人
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