| 摘要 |
A matching means (2) is arranged in a power source portion (5) including an RF power source (1), an output impedance (Z0) of the RF power source (1) is matched by the matching means with an impedance (ZL) of a laser tube (4) connected through a power transmitting means (3). Therefore, the laser tube (4) arranged in a laser emitting portion (6) is effectually supplied with an RF power generated by the RF power source (1), and a stable laser beam can be emitted from the laser tube (4) with a high efficiency. <IMAGE> |
