发明名称 Apparatus for monitoring impurities in a gas stream.
摘要 <p>A device is provided comprising a piezoelectric material and at least one coating reactive with trace quantities of oxygen and/or water in reactive and inert gases. The piezoelectric material is bonded to a conductor for delivering an alternating electric current and to a conductor for transmitting resonant vibration frequency of the crystal. The reactive coating has an effective thickness which provides a serviceable life for the coating while not being so thick as to prevent vibration of the piezoelectric material.</p>
申请公布号 EP0591847(A2) 申请公布日期 1994.04.13
申请号 EP19930115812 申请日期 1993.09.30
申请人 MILLIPORE CORPORATION 发明人 DILEO, ANTHONY J.;SNOW, JAMES T.;COTE, DANIEL A.
分类号 G01N29/02;G01N5/02;G01N27/00;G01N29/00;G01N29/036;(IPC1-7):G01N27/00;G01N33/00 主分类号 G01N29/02
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