发明名称 |
Apparatus for monitoring impurities in a gas stream. |
摘要 |
<p>A device is provided comprising a piezoelectric material and at least one coating reactive with trace quantities of oxygen and/or water in reactive and inert gases. The piezoelectric material is bonded to a conductor for delivering an alternating electric current and to a conductor for transmitting resonant vibration frequency of the crystal. The reactive coating has an effective thickness which provides a serviceable life for the coating while not being so thick as to prevent vibration of the piezoelectric material.</p> |
申请公布号 |
EP0591847(A2) |
申请公布日期 |
1994.04.13 |
申请号 |
EP19930115812 |
申请日期 |
1993.09.30 |
申请人 |
MILLIPORE CORPORATION |
发明人 |
DILEO, ANTHONY J.;SNOW, JAMES T.;COTE, DANIEL A. |
分类号 |
G01N29/02;G01N5/02;G01N27/00;G01N29/00;G01N29/036;(IPC1-7):G01N27/00;G01N33/00 |
主分类号 |
G01N29/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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