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发明名称
摘要
申请公布号
JPH0628286(B2)
申请公布日期
1994.04.13
申请号
JP19880202199
申请日期
1988.08.12
申请人
SANYO ELECTRIC CO
发明人
SANTO FUMIO;TOMIZUKA KAZUO
分类号
H01L21/761;H01L21/3205;H01L21/76;H01L21/82;H01L21/822;H01L23/52;H01L27/04;(IPC1-7):H01L21/82;H01L21/320
主分类号
H01L21/761
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代理人
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