发明名称 Interfermeter comprising an integrated arrangement and a reflecting part which are separated from each other by a measurement zone.
摘要 <p>Interferometer comprising an integrated arrangement (42) and a reflecting part (44) separated from this integrated arrangement by a measurement zone (46). This interferometer is characterised in that the measurement light beam (48) and the reference light beam (50) pass through the said measurement zone and are reflected by the said reflecting part, the optical paths of these two beams in the said integrated arrangement being substantially equal. &lt;IMAGE&gt;</p>
申请公布号 EP0591911(A2) 申请公布日期 1994.04.13
申请号 EP19930116051 申请日期 1993.10.05
申请人 CSEM, CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE S.A. 发明人 VOIRIN, GUY;FALCO, LUCIEN
分类号 G01B9/02;G01N21/45;(IPC1-7):G01J9/02 主分类号 G01B9/02
代理机构 代理人
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