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发明名称
摘要
申请公布号
JPH0627336(B2)
申请公布日期
1994.04.13
申请号
JP19850213161
申请日期
1985.09.25
申请人
SHIMADZU CORP
发明人
KASHIMA YOSHIO
分类号
C23C16/50;H01L21/205;(IPC1-7):C23C16/50
主分类号
C23C16/50
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