| 摘要 |
A soft magnetic thin film according to the invention has an atomic ratio composition represented by the formula: Fe(100-a-b)MaOb wherein M is at least one element selected from Group 3A elements and Group 4A elements, 2<=a<=15 and 4<=b<=35. It has a high saturation magnetic flux density Bs, high magnetic permeability (my), low coercive force Hc, improved frequency response, high electric resistivity (rho), and good corrosion resistance.
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