发明名称 |
Encoder using a birefringent element and a system including the same |
摘要 |
An encoder includes a light illuminating device, an optical scale and a photosensor, and detects information of relative displacement between the scale and the illuminating light. A birefringent element, such as a Savart plate or the like, is disposed in the optical path between the light illuminating device and the photosensor to generate a plurality of images of the scale having different phases. A plurality of output signals having a phase difference are obtained using the images of the scale.
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申请公布号 |
US5302821(A) |
申请公布日期 |
1994.04.12 |
申请号 |
US19920903522 |
申请日期 |
1992.06.24 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
IGAKI, MASAHIKO;ISHIZUKA, KOH;NYUI, MASARU |
分类号 |
G01D5/36;G01B11/00;G01D5/34;G01D5/38;(IPC1-7):G01D5/34;H01J3/14 |
主分类号 |
G01D5/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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