发明名称 POLISHING METHOD AND DEVICE THEREOF
摘要 PURPOSE:To provide a polishing method and a device thereof wherein a workpiece can be polished without using a center roller. CONSTITUTION:A device is provided with a drive motor 21 by which a surface plate 2 is rotated at each predetermined angle at each time of supplying a mounting plate by a workpiece supplier and continuously rotated at a predetermined speed after loading a predetermined number of sheets. A device comprises pressure heads 3a, 3c, 3d arranged in a quantity equal to the mounting plate in an upper part of the surface plate to bring workpieces 7... of the mounting plate into pressure contact with the surface plate and air cylinders 4a, 4c, 4d for lifting the pressure heads. Further, the device is provided with motors 5a, 5d for rotating the pressure heads at an equal speed and stoppers 8a, 8d for positioning the mounting plate brought into contact, conveyed by rotating at each predetermined angle the surface plate provided in a peripheral part of the pressure head.
申请公布号 JPH0699349(A) 申请公布日期 1994.04.12
申请号 JP19920250138 申请日期 1992.09.18
申请人 TOSHIBA MACH CO LTD 发明人 SUGANO HIROSHI;OISHI TOSHIO;ENDO MASAMI
分类号 B24B37/04;H01L21/304 主分类号 B24B37/04
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