LIGHT-LIGHT CONVERSION ELEMENT

摘要

PURPOSE:To provide a light-light conversion element whose light emitting element is composed of silicon. CONSTITUTION:A light-light conversion element is manufactured by integrating a photodiode 2 and a light emitting element 4 in the vertical direction. The photodiode 2 is formed by accumulating an (n) + type single crystal silicon layer 14 on the rear plane of a (p) type single crystal silicon substrate 12 by ion implantation or diffusion. On the (n) + type single crystal silicon layer 14, an electrode 6a is formed of Al layer. The light emitting element 4 is formed by forming a porous silicon layer 16 on the surface of the (p) type single crystal silicon substrate 12 by anodization and accumulating a noncrystal silicon carbon layer 18 which contains (n) type fine crystal on the porous silicon layer 16 by electron cyclotron resonance plasma CVD. On the amorphous silicon carbon layer 18 which contains (n) type fine crystal, a transparent electrode 6b is formed of ITO film.