| 摘要 |
PURPOSE:To attain a small size, low loss, low driving voltage, and high polarization extinction ratio by connecting and integrating a Ti diffused type optical waveguide (TIG) and a proton exchange type optical waveguide (PEG) on the same substrate. CONSTITUTION:The waveguides of a modulator part, bending part, demultiplexing part and multiplexing part are constituted by diffusion of Ti and the waveguide of a polarizer part is constituted by a proton exchange. Namely, the Y-branch type TIG 11 is formed by the Ti diffusion method on a waveguide substrate 10. The Y-branch type TIG includes the branch part 13 and the bent parts 12. A PEG 14 having a polarizer function is connected to the TIG 11. An SiO2 buffer layer 15 is loaded on the TIG/PEG waveguides. Respectively independent phase modulators 16 are loaded on the two waveguides on the exit side of the TIG. The SiO2 buffer has a striped mask pattern 17 in the part where the PEG waveguide is formed. This pattern plays the role as a mask for proton exchange as well. |
