ACTIVE MATRIX SUBSTRATE AND ITS PRODUCTION

摘要

PURPOSE:To provide the good display grade of an active matrix type liquid crystal display device by decreasing the spot defects and linear defects thereof. CONSTITUTION:Source wirings 3a, 3b and drain wirings 9a, 9b are formed into a two-layered structure consisting of transparent conductive films 3a, 9a and metallic thin films 3b, 9b and, therefore, the transparent conductive films 3a, 9a function as etching prohibiting layers of a gate insulating film 5 at the time of etching the metallic thin films 3b, 9b. Consequently, the gate insulating film 5 is well maintained without being deteriorated. Since the source wirings 3a, 3b are formed of the two-layered structure, the disconnection of the source wirings 3a, 3b hardly arises.