发明名称 DUST MONITOR
摘要 PURPOSE:To suppress the consumption amount of filter paper and to obtain a rapid responsiveness in an abnormal condition by converting the duct collecting time and the duct absorbing flow to a dust measuring system automatically. CONSTITUTION:A pump 17 is provided to the gas exhaust piping 12 of a chamber. The absorbing flow of dust obserbed into a sampler 10 per unit time is to be regulated by a flow regulating meter 18. An operation member 21 inputs a signal from a radiation detector 16, and carries out the operation of radioactivity density as to the collecting dust so as to measure the density. A dust collecting time setter 22 converts the dust collecting time by a filter paper according to the measuring value from the operation member 21. That is, when the measuring value exceeds a preset value, the operation cycle of a filter paper feeding mechanism 14 is controlled to convert. An absorbing flow setter 23 controls the regulating meter 18 according to the measuring value from the operation member 21, so as to convert the absorbing flow by the pump 17. That is, when the measuring value exceeds a preset value, the regulating meter 18 is controlled to convert.
申请公布号 JPH0694838(A) 申请公布日期 1994.04.08
申请号 JP19920245273 申请日期 1992.09.14
申请人 TOSHIBA CORP 发明人 AOKI YASUHIRO
分类号 G01N1/02;G01T1/167;G01T7/04;(IPC1-7):G01T1/167 主分类号 G01N1/02
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