| 摘要 |
<p>PURPOSE:To provide an orientation flat aligning device and a method of confirming that all the orientation flats of wafers contained in a cassette are aligned at the rear of the cassette and furthermore surely aligning all the orientation flats of the wafers if the orientation flats are not aligned. CONSTITUTION:An orientation flat aligning device is equipped with a confirming sensor 3 which confirms that the orientation flats of all wafers 8 contained in a wafer cassette 9 are aligned in position, and when the confirming sensor 3 detects that the orientation flats get out of position, a drive roller 2 is rotated again to retry the alignment of orientation flats, and if it is detected again that the orientation flats get out of position, an alarm is indicated on a display.</p> |
