SEMICONDUCTOR WAFER TRANSFER DEVICE

摘要

PURPOSE:To realize a semiconductor wafer transfer device which automatically introduces or unloads a semiconductor wafer into or from an external equipment drawing it out from a cassette or keeping it in a cassette. CONSTITUTION:A cassette stage 12 where a wafer cassette 3 which houses semiconductor wafers is placed is provided onto a truck 13, and a cassette hand 15 and a robot 14 are provided onto the truck 13. The wafer cassette 3 transferred onto the cassette stage 12 on the truck 13 by the cassette hand 15 is transferred to one wafer processing device, and a semiconductor wafer 2 on the cassette stage 12 is held by a wafer hand 16 and transferred to the other wafer processing device.