| 摘要 |
PURPOSE:To improve the yield of production of the thin-film magnetic head by correcting the variation in the shapes and sizes, such as magnetic film thickness generated in a thin film laminating stage for producing the thin-film magnetic head in a subsequent magnetic gap depth working stage and finally obtaining the head having uniform recording characteristics. CONSTITUTION:A ground surface film 2, a magnetic gap film 3, a protective film 4, a lower magnetic film 5, an upper magnetic film 6, an insulating layer 7 and a conductor coil 8 are formed on a substrate 1 in the thin film laminating stage. The gap depth G is worked to a prescribed value in the subsequent gap depth working stage. The recording characteristics strongly receive the influence of the film thickness t2 of the inclined part 6b of the upper magnetic film 6 and the distance Y between the boundary J of the front end regions of the magnetic poles and the front end position G0 of the insulating layer 7 in addition to the gap depth G. The characteristics vary if the film thickness t2 and the distance Y vary in the thin film laminating stage and, therefore, the depth G is adjusted in order to correct such variation (the recording magnetic field decreases if t2 decreases and Y increases and, therefore G is decreased in order to correct such decrease). |
