| 摘要 |
PURPOSE:To form a rear-surface-electrode protecting film excelling in its gas barrier performance, without deteriorating its adhesive quality to the electrode surface, by laminating in succession a transparent conductive film, an amorphous silicon layer and a rear-surface electrode on a transparent insulation substrate, and by forming a silicon oxide layer through the chemical vapor deposition method relative to a low pressure plasma on the rear-surface electrode after its formation. CONSTITUTION:A solar battery element 61 wherein a transparent conductive film, an amorphous silicon layer and a rear-surface electrode are laminated in succession on a transparent substrate is introduced into a vacuum container 63 via a loading chamber 62. Then, gasses are introduced into the vacuum container 63, and its predetermined degree of vacuum is maintained by the exhaust through a vacuum pump. While introducing tetramethyldisiloxane and oxygen as silicon-oxide-film forming gases, a plasma is formed by introducing a high-frequency power from a high-frequency electrode 67 into the vacuum container 63, and the silicon oxide film is formed on the solar battery element 61. When reaching a predetermined film thickness, the film formation is completed, and the element 61 is taken out via an unloading chamber 64. In such a solar battery module, the metallic electrode unit on its rear surface is protected by the silicon oxide layer. |
