| 摘要 |
PURPOSE:To provide the flexible substrate which is not impaired in flexibility in spite of a small size by forming a metallic film consisting of Al on a sheet consisting of polyethylene terephthalate and removing a photoresist and the metallic film. CONSTITUTION:The metallic film 3 is formed on a plastic film 2 and the photoresist 4 is applied thereon. The photoresist 4 is then contact exposed with UV rays 6 and is transferred with groove patterns by using a photomask 5 formed with the desired groove patterns and thereafter, the photoresist 4 of the exposed parts is removed by a developer, by which the plastic film 2 provided with the photoresists 4a... is obtd. The metallic film 3 of the exposed parts is then removed and further, the unexposed photoresist 4a is removed, by which the flexible substrate 1 is obtd. The flexible substrate 1 for the optical memory elements formed in such a manner consists of the metallic film 3 formed with the guide grooves at prescribed intervals on the plastic film 2. The substrate 1 which is not impaired in the flexibility in spite of the small size is thus obtd. |
