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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH0697186(A)
申请公布日期
1994.04.08
申请号
JP19920243879
申请日期
1992.09.14
申请人
TOSHIBA CORP
发明人
KUNIHIRO TAKASHI
分类号
H01L21/02;H01L21/306;H01L21/331;H01L29/73;H01L29/732;(IPC1-7):H01L21/331
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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