Verfahren zur Beschichtung eines Substrats mit einem Silicium und Stickstoff enthaltenden keramischen Material.
摘要
This invention relates to material produced by diluting in a solvent a platinum or rhodium catalyzed preceramic mixture of a hydrogen silsesquioxane resin. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
申请公布号
DE3787381(T2)
申请公布日期
1994.04.07
申请号
DE19873787381T
申请日期
1987.10.22
申请人
DOW CORNING CORP., MIDLAND, MICH., US
发明人
HALUSKA, LOREN ANDREW, MIDLAND, MICHIGAN, US;MICHAEL, KEITH WINTON, MIDLAND, MICHIGAN, US;TARHAY, LEO, SANFORD, MICHIGAN, US