Analysis of impurities in silicon chips - by melting chips, producing wafer, and determining concn. of impurities

摘要

Analysis of impurities in irregularly formed Si chips comprises (a) selecting zone-melting Si chips; (b) zone-melting the chips to distribute surface impurities of the chips in a Si single crystal; (c) producing a single crystalline Si wafer; and (d) determining the concn. of the impurities present in the wafer. USE/ADVANTAGE - For analysing electronic components such as rectifiers and transistors. The process can detect impurities present in small amts.