发明名称 Removal of impurities and improvement of minority carriers life-time in silicon.
摘要 A method of increasing the minority carrier recombination lifetime in a silicon body contaminated with transition metals, in particular iron. The silicon body is stored at a temperature and for a time which are adequate to bring about a diffusion of the metal out of the interior of the silicon body to its surface and increase the minority carrier recombination lifetime measurably.
申请公布号 EP0590508(A2) 申请公布日期 1994.04.06
申请号 EP19930115307 申请日期 1993.09.23
申请人 MEMC ELECTRONIC MATERIALS S.P.A. 发明人 FALSTER, ROBERT
分类号 H01L21/322;H01L21/324;(IPC1-7):H01L21/322 主分类号 H01L21/322
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