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发明名称
TEMPERATURE AND HUMIDITY CONTROLLER FOR CLEAN ROOM
摘要
申请公布号
JPH0694267(A)
申请公布日期
1994.04.05
申请号
JP19920265563
申请日期
1992.09.09
申请人
NIPPON STEEL CORP;HITACHI LTD;HITACHI PLANT ENG & CONSTR CO LTD
发明人
YOSHIDA OSAMU;TSUCHIYAMA HIROSHI;KAWAKAMI HIROAKI;FUSHIMI MITSUMASA;NAKAJIMA EIJI;KONISHI SHUNICHI
分类号
F24F5/00;F24F7/06;F24F11/02;(IPC1-7):F24F5/00
主分类号
F24F5/00
代理机构
代理人
主权项
地址
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