发明名称 ETCHING OF DIAMOND SUBSTRATE BY METAL MELTED OR PARTIALLY MELTED
摘要 A face of a diamond body (10, FIG. 1; 30, FIG. 2), such as a CVD diamond film, is etched by maintaining, for a prescribed time duration, at least a portion of the face in direct physical contact with a layer (11) comprising a molten or a partially molten metal or a metallic alloy of one or more than one rare earth metal, the layer having the property of dissolving carbon. While the body is being etched, various portions (31, 32, 33) of a major surface of the body can be protected for various time durations by masks against the etching--whereby, after dicing the body, each of the resulting dies can be used, for example, as a submount (30) for a laser (40) and a photodetector (61)--the latter for the purpose of feedback to the laser. <IMAGE>
申请公布号 JPH0692792(A) 申请公布日期 1994.04.05
申请号 JP19930160655 申请日期 1993.06.30
申请人 AMERICAN TELEPH & TELEGR CO <ATT> 发明人 UIRIAMU KUROSURII DAUTOREMONTOOSUMISU;JIYON EDOUIN GUREEBUNAA;SANGIYOO JIN;ABUISHIEI KATSUTSU
分类号 C30B29/04;C04B41/53;C04B41/91;C30B33/08;H01L21/24;H01L21/302;H01S5/00;(IPC1-7):C30B29/04 主分类号 C30B29/04
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