PROCESS FOR MANUFACTURING A SUPERCONDUCTOR AND A METHOD FOR PRODUCING A SUPERCONDUCTING CIRCUIT

摘要

A method for producing a superconducting circuit pattern involves depositing onto a substrate, a thin film layer of a compound oxide which does not initially exhibit satisfactory superconducting properties at 77.degree. K., but which can be changed to become superconducting at that temperature by oxygen ion beam irradiation. A focused oxygen ion beam is directed onto predetermined areas in the form of a circuit pattern on the thin film layer to convert the predetermined areas to a superconducting compound oxide.