发明名称 Process for the production of relief structures using a negative photoresist based on polyphenols and epoxy compounds or vinyl ethers
摘要 The present invention relates to a negative photoresist consisting essentially of a process for the production of relief structures using a) at least one solid film-forming polyphenol, b) at least one compound which contains at least two epoxide groups or at least two vinyl ether groups or at least one epoxide and vinyl ether group in the molecule, c) at least one cationic photoinitiator for component b) and d) if appropriate customary additives. The resist can be developed under aqueous-alkaline conditions.
申请公布号 US5300380(A) 申请公布日期 1994.04.05
申请号 US19920947899 申请日期 1992.09.17
申请人 CIBA-GEIGY CORPORATION 发明人 ROTH, MARTIN;MEIER, KURT
分类号 G03F7/038;(IPC1-7):G03F7/30;G03F7/40 主分类号 G03F7/038
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