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发明名称
SPUTTERING METHOD
摘要
申请公布号
JPH0693436(A)
申请公布日期
1994.04.05
申请号
JP19920242930
申请日期
1992.09.11
申请人
HITACHI LTD
发明人
HINODE KENJI;HONMA YOSHIO
分类号
C23C14/34;C23C14/54;H01L21/203;H01L21/28;H01L21/285;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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