发明名称 DIELECTRIC VIAS WITHIN MULTI-LAYER 3-DIMENSIONAL STRUCTURAL/SUBSTRATES
摘要 2124197 9407348 PCTABS00031 An array of dielectric vias formed in the insulating layers of a unitized multilayer circuit structure wherein the dielectric vias have a dielectric constant different from the dielectric constant of the insulating layers in which they are formed.
申请公布号 CA2124197(A1) 申请公布日期 1994.03.31
申请号 CA19932124197 申请日期 1993.09.23
申请人 发明人 MCCLANAHAN, ROBERT F.;WASHBURN, ROBERT D.
分类号 H01L23/498;H01L23/538;H05K1/00;H05K1/02;H05K1/03;H05K1/09;H05K1/16;(IPC1-7):H05K1/02 主分类号 H01L23/498
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