Substrate holder - has two pairs of elastic holding fingers located in the substrate plane

摘要

The holder for flat disc-shaped substrates (9) in a vacuum processing installation has two identical elastic holding fingers (1,2) and (1',2'). The holding fingers lie in the substrate plane; b) they are diametrically opposite to one another, and point towards the substrate midpoint (M); c) the enclosed angle (alpha) lies preferably between 25 and 120 deg.; d) the fingers of each pair are rigidly joined to one another; e) the joining points (5,6) and (5',6') lie on a straight line passing through (M); f) the direction of motion of the clamping elements (8) and (8') is approximately parallel to this straight line. USE/ADVANTAGE - For transport of disc-shaped substrates in vacuum processing installations. The entire disc face areas can be coated. Precise positioning of discs relative to the coating sources is possible.