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发明名称
Mehrkammerbeschichtungsanlage
摘要
申请公布号
DE4303462(C2)
申请公布日期
1994.03.31
申请号
DE19934303462
申请日期
1993.02.06
申请人
LEYBOLD AG, 63450 HANAU, DE
发明人
HARTIG, KLAUS, DR., BRIGHTON, MICH., US;SZCZYRBOWSKI, JOACHIM, DR., 8758 GOLDBACH, DE
分类号
B05B13/02;B65G49/06;B65G49/07;C03B35/16;C03C17/25;C23C14/56;(IPC1-7):C23C14/56;C03C17/00
主分类号
B05B13/02
代理机构
代理人
主权项
地址
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