Precision adjustable table for microscope or optical appts. - uses piezoelectric translator and coaxial spring membranes guiding linear adjustment

摘要

The table is linearly adjusted under direct control of a piezoelectric translator (5), with a linear displacement guide provided by at least two elastic elements (6, 7) arranged coaxial to the piezoelectric translator, which fits through a control bore in the elastic elements. Pref. the elastic elements are provided by annular spring membranes spaced apart in the setting direction via a cylindrical element (4) attached to the table (2) and a cylindrical carrier (3) attached to the stationary table base (1). ADVANTAGE - Frictionless precision adjustment of table with high resolution over relatively short adjustment path.