| 摘要 |
<p>A laser processing method establishes initial coupling between the laser beam and workpiece by irridiating an intermediate tool positioned adjacent the workpiece. The tool is more absorptive at the laser wavelength than the workpiece so that the efficiency of energy transfer is increased. Subsequent processing is performed by relative movement between the workpiece and beam, either independently of the tool or in conjunction with the tool. During furtheur processing, the beam diameter is increased to be greater than the thickness of the workpiece to enhance the further processing.</p> |
