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发明名称
Method and apparatus for cleaning atmosphere gas used in making high-purity fine particles of reactive metals.
摘要
申请公布号
EP0356698(B1)
申请公布日期
1994.03.30
申请号
EP19890113587
申请日期
1989.07.24
申请人
ISHIKAWAJIMA-HARIMA HEAVY INDUSTRIES CO., LTD.;IHI MASTER METAL LTD.
发明人
YAMAGUCHI, TORU;INAZUKI, YUKIO;NAKAZAWA, HIDEO
分类号
B01D5/00;B01D53/26;G01N31/22;(IPC1-7):B01D53/26
主分类号
B01D5/00
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