| 摘要 |
<p>Calibration device for adjusting, in UHF, said reference planes of an appliance for measuring dispersion parameters of elements of integrated circuits on a substrate, this device comprising, integrated onto this same substrate, standard patterns and accesses to these patterns which are compatible with the contacts of two test probes connected to the appliance, characterised in that it comprises at least, on this substrate, two identical series of standard patterns formed by parallel lines of the same length, among which: - one short-circuited line and/or one open line, and/or one loaded line, the accesses to which are aligned in each series, but opposed from one series to the other with respect to the region where the second ends are arranged, and these second ends of which are aligned in each series, defining the said reference planes arranged face-to-face, separated by a defined distance d, second ends which are furthermore arranged offset from one series to the other in the plane of the substrate, by translations parallel to the reference planes, in such a way that the distance between these offset ends is equal to or greater than twice the thickness of the substrate and in such a way that the distance d separating the reference planes is approximately equal to or less than three times the thickness of the substrate. Application: characterisation of UHF integrated circuits. <IMAGE></p> |
