ARRANGEMENT FOR STARTING ELECTRIC MOTOR

摘要

a detection device of motor stop signal which selects the stop signal of the servo motor to output it; an ion implanting signal detection device which generates an open signal for Faraday flag; an emergency signal generating device (26) which logically combines outputs of the two devices to detect a motor temporary stop while ion implanting; a latch device which latches an emergency signal until the input of a removal signal; an alarm device which warns externally that the servo motor is at stop; and a shut off device which prevents the faraday flag signal for ion implanting on the output of the emergency signal.