发明名称 |
Steered arc coating with thick targets |
摘要 |
A process and apparatus for controlled arc coating of substrates utilizing relatively thick cathodes or targets for obtaining coatings which are free of macro-particles. The thick targets are capable of use by controlling and steering the arc in a desired path as necessary to produce coatings of the desired compositions using magnetic fields generated to provide arc path control and modulation for efficient cathode utilization.
|
申请公布号 |
US5298136(A) |
申请公布日期 |
1994.03.29 |
申请号 |
US19870086552 |
申请日期 |
1987.08.18 |
申请人 |
REGENTS OF THE UNIVERSITY OF MINNESOTA |
发明人 |
RAMALINGAM, SUBBIAH |
分类号 |
C23C14/32;C23C14/54;H01J37/32;(IPC1-7):C23C14/22 |
主分类号 |
C23C14/32 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|