发明名称 |
Scanning interference electron microscopy |
摘要 |
A scanning interference electron microscope includes an electron source, a focusing lens, an electron beam deflection system and a biprism. The biprism separates the primary electron beam emanating from the electron source into two beams. One of the separated beams is controlled by the deflection system to scan the sample surface, thereafter interfering with the other separated beam to generated interference fringes. The phase difference due to interaction of the first electron beam with a sample surface produces changes in the interference intensity of the interference fringes, which represent a microscopic image of the sample.
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申请公布号 |
US5298747(A) |
申请公布日期 |
1994.03.29 |
申请号 |
US19910794007 |
申请日期 |
1991.11.19 |
申请人 |
HITACHI, LTD. |
发明人 |
ICHIKAWA, MASAKAZU;YAJIMA, YUSUKE;TAKESHITA, MASATOSHI;KOBAYASHI, TOSHIO |
分类号 |
G01Q30/02;H01J37/28;(IPC1-7):H01J37/26 |
主分类号 |
G01Q30/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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