PRODUCTION OF SILICON NITRIDE SINTERED COMPACT

摘要

PURPOSE:To produce a silicon nitride sintered compact having high dimen-sional precision because of low shrinkage by sintering and excellent in strength and toughness. CONSTITUTION:A compact is produced by using silicon powder having 5-300mum average particle diameter, the silicon in the compact is nitrided by heating the compact in a nitrogen atmosphere and the nitrided compact is fired at >=1,900 deg.C.